Tamura Masao | Central Research Laboratory Hitachi Ltd.
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概要
関連著者
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Tamura Masao
Central Research Laboratory
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Tamura Masao
Central Research Laboratory Hitachi Ltd.
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TAMURA Masao
Central Research Laboratory, Hitachi, Ltd.
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SUGITA Yoshimitsu
Central Research Laboratory, Hitachi Ltd.
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UEMATSU Tsuyoshi
Central Research Laboratory
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Matsubara Sunao
Central Research Laboraotry
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Saitoh Tadashi
Central Research Laboratory
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KONDO Masao
Central Research Laboratory, Hitachi, Ltd.
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Sugita Yoshimitsu
Central Research Laboratory Hitachi Ltd.
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Sugita Yoshimitsu
Central Research Laboratory Hitachi Ltd.:(present Address) Musashi Works Hitachi Ltd.
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Kondo Masao
Central Research Laboratory Hitachi Ltd.
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Saitoh Tadashi
Central Research Laboraotry
著作論文
- very-Low-Temperature Silicon Epitaxy by Plasma-CVD Using SiH_4-PH_3-H_2 Reactants for Bipolar Devices : Condensed Matter
- Distribution and Character of Misfit Dislocations in Homoepitaxial Silicon Crystals