Jang Seong-soo | Department Of Materials Science And Engineering Korean Advanced Institute Of Science And Technology

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概要

• 同名の論文著者
• Department Of Materials Science And Engineering Korean Advanced Institute Of Science And Technologyの論文著者

関連著者

• Jang Seong-soo

  Department Of Materials Science And Engineering Korean Advanced Institute Of Science And Technology

• Lee Won-jong

  Department Of Computer Science Yonsei University

• Lee Won-jong

  Department Of Materials Science And Engineering Korean Advanced Institute Of Science And Technology

著作論文

• Effect of Gas Composition on TiN Thin-Film Fabrication in N_2/H_2/Ar/TiCl_4 Inductively Coupled Plasma-Enhanced Chemical Vapor Deposition System : Semiconductors

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