Lee H‐d | Process Development Team Semiconductor R&d Center Samsung Electronics
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- LEE Hyeon-Deokの詳細を見る
- 同名の論文著者
- Process Development Team Semiconductor R&d Center Samsung Electronicsの論文著者
Process Development Team Semiconductor R&d Center Samsung Electronics | 論文
- Challenge to 0.13μm Device Patterning using KrF
- Challenge to 0.13μm Device Patterning using KrF
- Challenge to 0.13μm Device Patterning using KrF
- Electrical Properties of Crystalline Ta_2O_5 with Ru Electrode
- Electrical Properties of Ru/Ta_2O_5/Ru Capacitor for 1 Giga-Scale DRAMs and Beyond