Saitou Yoshifumi | Utsunomiya University
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概要
関連著者
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斎藤 和史
宇都宮大・工
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斎藤 和史
宇都宮大工
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Saitou Yoshifumi
Utsunomiya University
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Tsushima Akira
Yokohama National Univ. Yokohama Jpn
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YOSHIMURA Shinji
National Institute for Fusion Science
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Ikeda Yoshito
Sony Chemical & Information Device Corporation
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ISHII Kiyoshi
Utsunomiya University
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FURUTANI Kengo
Utsunomiya University
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SAKUMA Hiroshi
Utsunomiya University
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YOSHIMURA Shinji
National Institute for Fusion Science, Toki 509-5292, Japan
著作論文
- Estimation of Optimum Ion Energy for the Reduction of Resistivity in Bias Sputtering of ITO Thin Films
- Neutral Particles at the Boundary of Microwave Discharge Plasma in HYPER-I