MUKHERJEE-ROY Moitreyee | Institute of Microelectronics
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概要
関連著者
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MUKHERJEE-ROY Moitreyee
Institute of Microelectronics
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Bliznetsov Vladimir
Institute Of Microelectronics
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Samudra Ganesh
National University Of Singapore
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Badam Ramana
Institute of Microelectronics, 11 Science Park Road, Singapore Science Park 2, 117685, Singapore
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Mukherjee-Roy Moitreyee
Institute of Microelectronics, 11 Science Park Road, Singapore Science Park 2, 117685, Singapore
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Shaoyu Wu
Institute of Microelectronics, 11 Science Park Road, Singapore Science Park 2, 117685, Singapore
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Naman Ananth
Honeywell Electronic Materials, 349 Moffett Park Dr, Sunnyvale, CA 94089, USA
著作論文
- A Dual BARC method for Lithography and Etch for Dual Damascene with Low K
- Eliminating Sidewall Damage During Etch Process for Ultra Low-$k$ Film