Kimoto Tsunenobu | Dept. Of Electronic Sci. & Eng. Kyoto University
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概要
Dept. Of Electronic Sci. & Eng. Kyoto University | 論文
- High-Voltage 4H-SiC RESURF MOSFETs Processed by Oxide Deposition and N_2O Annealing
- Interface Properties of Metal-Oxide-Semiconductor Structures on 4H-SiC{0001} and (1120) Formed by N_2O Oxidation