WHANG Soon-Hong | Central Research Center, Hyundai Microelectronics Co., Ltd.

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概要

関連著者

Lee Wan-jin
Faculty Of Applied Chemistry And Research Institute For Catalysis Chonnam National University
Park Jin
Central Research Center Hyundai Microelectronics Co. Ltd.
WHANG Soon-Hong
Central Research Center, Hyundai Microelectronics Co., Ltd.
KIM Jun
Central Research Center, Hyundai Microelectronics Co., Ltd.
KIM Do-Heyoung
Faculty of Applied Chemistry and Research Institute for Catalysis, Chonnam National University
CHO Dong-Lyun
Faculty of Applied Chemistry and Research Institute for Catalysis, Chonnam National University

著作論文

Conformality of Chemical-Vapor-Deposited Tungsten on TiN Prepared by Metal-organic Chemical Vapor Deposition via Cyclic Plasma Treatment

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