Oda M | Ntt Telecommunications Energy Lab. Kanagawa Jpn
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概要
Ntt Telecommunications Energy Lab. Kanagawa Jpn | 論文
- Lattice Deformation and Ga Diffusion Concerning InAs Self-Assembled Quantum Dots on GaAs(100) as a Function of Growth Interruption Time
- Crystallographic Properties of Closely Stacked InAs Quantum Dots Investigated by Ion Channeling
- Interdiffusion between InAs Quantum Dots and GaAs Matrices
- Evaluation of Overlay Accuracy for 100-nm Ground Rule in Proximity X-Ray Lithography
- Performance of X-Ray Stepper for Next-Generation Lithography