Sato Nobuhiko | Eltran Project Device Development Center Canon Inc.
スポンサーリンク
概要
Eltran Project Device Development Center Canon Inc. | 論文
- Defect Engineering in Epitaxial Layers over Porous Silicon for ELTRAN^【○!R】 SOI Wafers
- Extremely Low Si Etching (
- Current Progress in Epitaxial Layer Transfer (ELTRAN^[○!R]) (Special Issue on SOI Devices and Their Process Technologies)
- Advanced Quality in Epitaxial Layer Transfer by Bond and Etch-back of Porous Si
- Advanced Quality in Epitaxial Layer Transfer by Bond and Etch-Back of Porous Si