Aoi Nobuo | Association Of Super-advanced Electronics Technologies (aset)
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概要
関連著者
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Aoi Nobuo
Association Of Super-advanced Electronics Technologies (aset)
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FUKUDA Takuya
Association of Super-Advanced Electronics Technologies (ASET)
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MATSUNAGA Hironori
Association of Super-Advanced Electronics Technologies (ASET)
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Funaki Yoshinori
Corporate R&D Center, Daicel Chemical Industries, Ltd., 1239 Shinzaike, Aboshi-ku, Himeji, Hyogo 671-1283, Japan
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Fukuda Takuya
Association of Super-Advanced Electronics Technologies (ASET), 292 Yoshida-cho, Totsuka-ku, Yokohama 244-0817, Japan
著作論文
- Novel Method of Estimating Dielectric Constant for Low-k Materials: Semiconductors
- Low Dielectric Constant Film Containing No Oxygen for Barrier-Free Cu Interconnects