KIM Chang-Koo | Department of Chemical Engineering, Ajou University

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概要

• 同名の論文著者
• Department of Chemical Engineering, Ajou Universityの論文著者

関連著者

• Ryu Hyun-kyu

  Corporate Research And Development Lg Chem Ltd.

• Shin Chee

  Department Of Chemical Engineering Ajou University

• KIM Yil-Wook

  Memory Research and Development Division, Hynix Semiconductor Inc.

• KIM Chang-Koo

  Department of Chemical Engineering, Ajou University

• Kim Chang-koo

  Department Of Chemical Engineering Ajou University

• Kim Yil-wook

  Memory Research And Development Division Hynix Semiconductor Inc.

著作論文

• Effects of Wafer Cleaning on the Interconnect Structure and Its Electrical Properties during the Al Dual Damascene Process for the Fabrication of Sub-100nm Memory Devices

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