Tabata Osamu | Kyoto Univ. Kyoto Jpn
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概要
関連著者
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Tabata Osamu
Kyoto Univ. Kyoto Jpn
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MATSUZUKA Naoki
Graduate School of Science and Engineering, Ritsumeikan University
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TABATA Osamu
Graduate School of Engineering, Kyoto University
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Tabata Osamu
Kyoto University
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HAYASHI Shigehiko
Mitsuboshi Belting Ltd.
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Tabata Osamu
Graduate School Of Engineering Kyoto University
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Matsuzuka Naoki
Graduate School Of Science And Engineering Ritsumeikan University
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Yagyu Hiromasa
Mitsuboshi Belting Ltd.
著作論文
- Validation of X-ray lithography and development simulation system for moving mask deep X-ray lithography
- Algorithm to Derive Optimal Mask and Movement Patterns in Moving Mask Deep X-ray Lithography (M^2DXL)
- Fabrication of Plastic Micro Tip Array using Laser Micromachining of Nanoparticles Dispersed Polymer and Micromolding