Kaneko Shinji | Advanced Tech. Research Center Olympus Optical Co. Ltd.
スポンサーリンク
概要
関連著者
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鈴木 清輝
小糸工業(株)
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Kaneko Shinji
Advanced Tech. Research Center Olympus Optical Co. Ltd.
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OGAWA Hirofumi
MEMS and Packaging Division, National Institute of Advanced Industrial Science and Technology (AIST)
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SUZUKI Kiyoteru
Information Equipment System Engineering Dept., Koito Industries, Ltd.
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Suzuki Kiyoteru
Koito Industries Ltd.
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Ogawa Hirofumi
Tech. Information Dept. National Inst. Of Advanced Industrial Science And Tech.
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Saka Masumi
Dept. Of Mechanical Engineering Tohoku Univ.
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KANEKO Shinji
MEMS Technology Division, Olympus Corporation
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MAEDA Ryutaro
MEMS and Packaging Division, National Institute of Advanced Industrial Science and Technology (AIST)
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Ogawa Hirofumi
Tech. Information Dept., National Inst. of Advanced Industrial Science and Tech.
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Maeda Ryutaro
Mems And Packaging Division National Institute Of Advanced Industrial Science And Technology (aist)
著作論文
- 特集論文 Effect of Ar Gas Pressure on Mechanical Properties of Sputtered Ti Thin Films (特集:MEMS/NEMS材料特性および信頼性評価)
- OS6(P)-26(OS06W0224) Effect of Ar Gas Pressure on Growth, Structure, and Mechanical Properties of Sputtered Ti Thin Films