Shigeishi M | Kumamoto Univ. Kumamoto Jpn
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概要
Kumamoto Univ. Kumamoto Jpn | 論文
- Slip-Free Driving Method for Nonresonant Piezoelectric Actuator
- Highly Reliable Piezoelectric Actuator for Precision Stage System
- P-PW-05 Development of the non-resonance type ultra-sonic motor and its application for XY-stage
- Sub-Nanometer Resolution Ultrasonic Motor for 300 mm Wafer Lithography Precision Stage
- Attoliter Control of Microliquid