Dutta A | Opto-electronics Research Laboratories Nec Corporation
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概要
関連著者
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Dutta A
Opto-electronics Research Laboratories Nec Corporation
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Dutta Achyut
Opto-electronics Research Laboratories Nec Corporation
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Dutta Achyut
Opto-Electronics Research Laboratories, NEC Corporation
著作論文
- Electron Spectroscopy for Chemical Analysis Study on Influence of Polymerization on Anisotropic Etching of Thick Silicon Oxide Using C_2F_6 Based ECM-RIBE
- Side Wall Roughness Reduction in Deep Silicon Oxide Etching Using C_2F_6 Based ECR-RIBE