Tanabe Hitoshi | College Of Engineering And Research Center Of Ion Beam Technology Hosei University

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概要

関連著者

Tanabe Hitoshi
College Of Engineering And Research Center Of Ion Beam Technology Hosei University
NAKAMURA Tomonori
College of Engineering and Research Center of Ion Beam Technology, Hosei University
SATOH Masataka
College of Engineering and Research Center of Ion Beam Technology, Hosei University
Satoh Masataka
College Of Engineering And Research Center Of Ion Beam Technology Hosei University
Nakamura Tomonori
College Of Engineering And Research Center Of Ion Beam Technology Hosei University

著作論文

High Electrical Activation of Implanted Phosphorus in the Fully Amorphized Implant-Layer by Solid-Phase Epitaxy on (1120)-Oriented 6H-SiC

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