Goto Yoshiyuki | Manufacturing Development Laboratory, Mitsubishi Electric Corp.
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概要
Manufacturing Development Laboratory, Mitsubishi Electric Corp. | 論文
- Preparation of Nearly Stoichiometric Superconducting Y-Ba-Cu-O Films by an MOCVD Technique Using Ozone
- Preparation and Characterization of Superconducting Y-Ba-Cu-O Films by the MOCVD Technique
- Investigation of Precursors Formed by Mixing SiH2Cl2 with NH3 for Chemical Vapor Deposition of Silicon nitride Films
- Spectroscopic Study on a Discharge Plasma of MOCVD Source Gases for High-T_C Superconducting Films
- Dependence of In-Plane Anisotropy in Polyimide Langmuir-Blodgett Films on Molecular Weight of Polyamic Acid