Okada Hiroyuki | Kyoto Research Lab., Matsushita Electronics Corp.
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概要
Kyoto Research Lab., Matsushita Electronics Corp. | 論文
- Evaluation of Device Charging in Ion Implantation : Ion Beam Process
- Evaluation of Device Charging in Ion Implantation
- Quantitative Charge Build-Up Evaluation Technique by Using MOS Capacitors with Charge Collecting Electrodes in Wafer Processing (Special Issue on Microelectronic Test Structure)
- Charge Buildup in Magnetized Process Plasma
- Experimental and Theoretical Study of the Charge Build-Up in an ECR Etcher : Etching and Deposition Technology