KO Jong | Graduate School of Mechanical Engineering, Pusan National University
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概要
Graduate School of Mechanical Engineering, Pusan National University | 論文
- Observability Analysis Techniques on Inertial Navigation Systems
- Prediction of Real Contact Area from Microtopography on CMP Pad
- Experimental Investigation of Material Removal Characteristics in Silicon Chemical Mechanical Polishing
- Effect of Process Parameters on Particle Removal Efficiency in Poly(vinyl alcohol) Brush Scrubber Cleaning
- Chemical Mechanical Planarization Method for Thick Copper Films of Micro-Electro-Mechanical Systems and Integrated Circuits