Park Jea-Gun | Nano-SOI Process Laboratory, Department of Electrical and Computer Engineering, Hanyang University
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- 同名の論文著者
- Nano-SOI Process Laboratory, Department of Electrical and Computer Engineering, Hanyang Universityの論文著者
Nano-SOI Process Laboratory, Department of Electrical and Computer Engineering, Hanyang University | 論文
- Extended Defects and Pile-Up of Interstitial Oxygen in Silicon Wafer Due to MeV-Level Nitrogen Ion Implantation
- Extended Defects and Pile-Up of Interstitial Oxygen in Silicon Wafer Due to MeV-Level Nitrogen Ion Implantation