Konishi Masami | Electronics Research Laboratory, Kobe Steel, Ltd.
スポンサーリンク
概要
Electronics Research Laboratory, Kobe Steel, Ltd. | 論文
- Preparation of Highly Porous Silica Aerogel Thin Film by Supercritical Drying
- Influence of Wafer Material on Defect Generation During Deep Submicron LOCOS Process
- Focused Ion Beam Lithography Using Ladder Silicone Spin-on Glass as a Positive Resist
- The Electron Charging Effects of Plasma on Notch Profile Defects
- Focused Ion Beam Lithography Using Ladder Silicone Spin-On Glass