Suzuki Keigo | SurfTech Transnational Co., Ltd.
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概要
SurfTech Transnational Co., Ltd. | 論文
- 大面積成膜, 量産化技術の最前線 : 欧州におけるパルスマグネトロンスパッタ技術
- Al-Doped ZnO Films Deposited by Reactive Magnetron Sputtering in Mid-Frequency Mode with Dual Cathodes
- Impedance Control of Reactive Sputtering Process in Mid-Frequency Mode with Dual Cathodes to Deposit Al-Doped ZnO Films
- High Rate Reactive Sputter Deposition of TiO2 Films for Photocatalyst and Dye-Sensitized Solar Cells
- Impedance Control of Reactive Sputtering Process in Mid-Frequency Mode with Dual Cathodes to Deposit Al-Doped ZnO Films