Matsui Yuichi | Central Research Laboratory, Hitachi Ltd., 1-280 Higashi-Koigakubo, Kokubunji, Tokyo 185-8601, Japan
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- Central Research Laboratory, Hitachi Ltd., 1-280 Higashi-Koigakubo, Kokubunji, Tokyo 185-8601, Japanの論文著者
Central Research Laboratory, Hitachi Ltd., 1-280 Higashi-Koigakubo, Kokubunji, Tokyo 185-8601, Japan | 論文
- Effects of Thin Film Interference on Junction Activation during Sub-Millisecond Annealing
- A Model Analysis of Feature Profile Evolution and Microscopic Uniformity during Polysilicon Gate Etching in Cl2/O2 Plasmas
- Non-contact Deformable Mirror Actuator for Spherical Aberration Compensation
- Layer-Selection-Type Recordable Optical Disk with Inorganic Electrochromic Film
- Improvement of Overwrite Jitter of a Phase-Change Optical Disk with Al-Alloy Double-Reflective-Layer Structure