Kotani Koji | Department of Electronics, Faculty of Engineering, Tohoku University

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• Kotani Kojiの詳細を見る
• 同名の論文著者
• Department of Electronics, Faculty of Engineering, Tohoku Universityの論文著者

Department of Electronics, Faculty of Engineering, Tohoku University | 論文

• Ultra Low-Temperature Growth of High-Integrity Thin Gate Oxide Films by Low-Energy Ion-Assisted Oxidation
• Native Oxide Growth on Silicon Surface in Ultrapure Water and Hydrogen Peroxide
• Instability of an Interface Between Two Immiscible Fluids Under a Vertical Oscillation : Fluids Engineering
• Minimizing Wafer Surface Damage and Chamber Material Contamination in New Plasma Processing Equipment
• High-Reliability Lithography Performed by Ultrasonic and Surfactant-Added Developing System

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