川口 明廣 | Kanagawa Industrial Research Institute
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概要
Kanagawa Industrial Research Institute | 論文
- Determination of Trace Impurities on Silicon-Wafer Surface by Isotope Dilution Analysis Using Electrothermal Vaporization/Inductively Coupled Plasma Mass Spectrometry
- Analytical Characteristics of Inductively Coupled Oxygen-Plasma Mass Spectrometry Assisted by Adding Argon to the Outer Gas