足立 正 | EBARA Research Co., LTD.
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概要
EBARA Research Co., LTD. | 論文
- Analysis of Swirling Flow with Spiral Vortex Core in a Pipe
- Fast Atom Beam Etching of Glass Materials with Contact and Non-Contact Masks
- Comparison of the Planarization Technologies for the Next Generation
- High-Efficiency Low Energy Neutral Beam Generation Using Negative Ions in Pulsed Plasma
- High-Efficiency Neutral-Beam Generation by Combination of Inductively Coupled Plasma and Parallel Plate DC Bias : Nuclear Science, Plasmas, Electric Dischanges