MURAKAWA Shigemi | 論文著者

Center For Integrated Systems Stanford University

Center for Integrated Systems, Stanford University

Center for Integrated Systems, Stanford University, Stanford, CA 94305–4070, USA

Center for Integrated Systems, Stanford University, Stanford, CA94305–4070, USA

Center for Integrated Systems, Stanford University:(Present address)LSI Research Center, Kawasaki Steel Corporation

Management of Science and Technology, Graduate School of Engineering, Tohoku University, Sendai 980-8579, Japan

Tokyo Electron Ltd.

Tokyo Electron Ltd., Single Wafer Deposition Department

Tokyo Electron Ltd., Single Wafer Deposition Department, 3-6 Akasaka 5-chome, Minato-ku, Tokyo 107-8481, Japan