KURIHARA Kazuaki | 論文著者

Advanced Lsi Technology Laboratory Corporate Research & Development Center Toshiba Corporation

Advanced LSI Technology Laboratory, Corporate Research & Development Center, Toshiba Corporation

Advanced LSI Technology Laboratory, Corporate Research & Development Center, Toshiba Corporation

Business development Dept. Rotating Machinery Operations, IHI Corporation

Department of Information and Communication Technology Tokai University

Department of Information and Communication Technology, Tokai University:Department of Physics, School of Science, Tokai University

Devices and Materials Research Laboratories, Fujitsu Laboratories Ltd., 10-1 Morinosato Wakamiya, Atsugi, Kanagawa 243-0197, Japan

Environmental Benign Etching Technology Laboratory, ASET

Environmental Benign Etching Technology Laboratory, ASET, Morinosato Wakamiya, Atsugi-shi, Kanagawa 243-0198, Japan

Environmental Benign Etching Technology Laboratory, Association of Super-Advanced Electronics Technologies (ASET)

Environmental Benign Etching Technology Laboratory, Association of Super-Advanced Electronics Technologies (ASET), 3-1 Morinosato Wakamiya, Atsugi-shi, Kanagawa 243-0198, Japan

Fujitsu Laboratories Inorganic Materials & Polymers Laboratory

Fujitsu Laboratories Limited, 10-1 Morinosato-Wakamiya, Atsugi, Kanagawa 243-0197, Japan

Fujitsu Laboratories Ltd .

Fujitsu Laboratories Ltd,.

Fujitsu Laboratories Ltd.

Fujitsu Laboratories Ltd., 10-1 Morinosato-Wakamiya, Atsugi, Kanagawa 243-0197, Japan

Fujitsu Laboratories Ltd., 10-1 Morinosato-Wakamiya, Atugi 243-0197, Japan

Fujitsu Laboratories Ltd., Inorganic Materials & Polymers Laboratory, 10–1 Morinosato–Wakamiya, Atsugi 243–01, Japan

Fujitsu Limited & Fujitsu Laboratories Ltd.