Molecular Dynamics Study on Enhanced Cu Coverage of Trench Filling with Low-Index Ta Surfaces (Special Issue : Microprocesses and Nanotechnology)

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概要

• 論文の詳細を見る

著者

• YANG Jaw-Yen

  Institute of Applied Mechanics, National Taiwan University

• Hong Rong-Tai

  Department of Mechanical Engineering, China University of Science and Technology, Taipei 115, Taiwan

関連論文

• A Three-Dimensional Semiclassical Lattice Boltzmann Method for Lid-Driven Cubic Cavity Flows
• Molecular Dynamics Study on Enhanced Cu Coverage of Trench Filling with Low-Index Ta Surfaces (Special Issue : Microprocesses and Nanotechnology)

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