Improvement in Film Quality of Epitaxial Graphene on SiC(111)/Si(111) by SiH Pretreatment (Special Issue : Microprocesses and Nanotechnology)
スポンサーリンク
概要
著者
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Sanbonsuge Shota
RIEC, Tohoku University, Sendai 980-8577, Japan
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Abe Shunsuke
RIEC, Tohoku University, Sendai 980-8577, Japan
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Handa Hiroyuki
RIEC, Tohoku University, Sendai 980-8577, Japan
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Takahashi Ryota
RIEC, Tohoku University, Sendai 980-8577, Japan
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Imaizumi Kei
RIEC, Tohoku University, Sendai 980-8577, Japan
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Fukidome Hirokazu
RIEC, Tohoku University, Sendai 980-8577, Japan
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Suemitsu Maki
RIEC, Tohoku University, Sendai 980-8577, Japan