Characterization and Control of Nanostructure Size Variation (Special Issue : Advanced Metallization for ULSI Applications)
スポンサーリンク
概要
著者
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Hata Nobuhiro
Innovation Center for Advanced Nanodevices (ICAN), National Institute of Advanced Industrial Science and Technology (AIST), Tsukuba, Ibaraki 305-8569, Japan
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Akinaga Hiro
Innovation Center for Advanced Nanodevices (ICAN), National Institute of Advanced Industrial Science and Technology (AIST), Tsukuba, Ibaraki 305-8569, Japan