Bimorph cantilevers actuated by focused laser from the side

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概要

• 論文の詳細を見る
• 電気学会の論文

著者

• Toda Masaya

  Graduate School Of Engineering Tohoku University

• Inomata Naoki

  Graduate School Of Engineering Tohoku University

関連論文

• Micro Wishbone Interferometer for Miniature FTIR Spectrometer
• Bimorph cantilevers actuated by focused laser from the side
• Bimorph Cantilevers Actuated by Focused Laser from the Side

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