01-O-33 Formation Mechanism of β-SiC Thin Film from Carbon Film and SiO Gas
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概要
- 論文の詳細を見る
- 日本セラミックス協会の論文
- 2003-09-29
著者
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Uchiyama Y
Nagasaki Univ. Nagasaki Jpn
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SANO Hideaki
Nagasaki University, Faculty of Engineering
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HIGUCHI Takehiro
Nagasaki University, Faculty of Engineering
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ZHENG Guo
Nagasaki University, Faculty of Engineering
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UCHIYAMA Yasuo
Nagasaki University, Faculty of Engineering
関連論文
- 01-O-33 Formation Mechanism of β-SiC Thin Film from Carbon Film and SiO Gas
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