セラミックスのキャラクタライゼーションへのIPMAの応用
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概要
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An experiment of application of the ion probe mass analyzer, the newest instrument for characterization, was carried out through the observation of material transport in case of the solid state reaction. The self-diffusion phenomenon which can not be observed by EPMA could be observed using an isotope as a tracer. The local resolution which can not become less than 5 μ in case of applying EPMA to light elements was about 10 μ in to-day's condition, but it is theoretically expected to become less than 0.5 μ. An obstacle of charging-up in case of applying to insulators was settled by using an electron spray. The quantitatire determination of concentration was remained as a future problem.
- 1973-11-01
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