Measurement of Residual Stresses in Ferroelectric Pb(Zr

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概要

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• The residual stresses in Pb(Zr<inf>0.3</inf>Ti<inf>0.7</inf>)O<inf>3</inf>thin films were measured by the \sin^{2}\Psi method using the normal X-ray incidence. The spacing of different planes (hkl) parallel to the film surface were converted to the spacing of a set of inclined planes (100). The angles between (100) and (hkl) were equivalent to the tilting angles of (100) from the normal of film surface. The residual stresses were extracted from the linear slope of the strain difference between the equivalent inclined direction and normal direction with respect to the \sin^{2}\Psi. The results were in consistency with that derived from the conventional \sin^{2}\Psi method.

• 2013-12-25

著者

• Zhu Hui

  College of Electronic Information and Control Engineering, Beijing University of Technology, Beijing 100124, P. R. China

• Chu Daping

  Electric Engineering Division, University of Cambridge, Cambridge CB3 0FA, U.K.

関連論文

• Measurement of Residual Stresses in Ferroelectric Pb(Zr

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