Universal Formula for Secondary Electron Yield of Metals at High Electron Energy and Incident Angle \theta

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On the basis of the main physical processes of secondary electron emission, the relationships among the incident energy (W_{\text{p0}}) of primary electrons, the number of secondary electrons (\delta_{\text{PE}\theta}) released per primary electron entering the metal at high electron energy and incident angle \theta and incident angle (\theta) are deduced. In addition, the relationship between the number of secondary electrons (\delta_{\text{PE0}}) released per primary electron entering the metal at \theta = 0° and W_{\text{p0}} is determined. From the experimental results, the relationships among the ratio \beta_{\theta} (the subscript \theta means the primary electron is incident at \theta in this paper), the ratio at \theta = 0° (\beta_{0}) and \theta are obtained. On the basis of relationships among \delta_{\text{PE}\theta}, \delta_{\text{PE0}}, \beta_{\theta}, \beta_{0}, backscattered coefficient \eta_{\theta}, backscattered coefficient at \theta = 0° (\eta_{0}), secondary electron yield \delta_{\theta}, and secondary electron yield at \theta = 0° (\delta_{0}), the universal formula for expressing \delta_{\theta} using \delta_{0}, \eta_{\theta}, \eta_{0}, and \theta is deduced. The secondary electron yield calculated from this universal formula and the yields measured experimentally from aluminum and copper are compared. The results suggest that the proposed formula is universal for the estimation of secondary electron yields in the angle range of 0--80° and the energy range of 10--102 keV.
2011-12-25

Universal Formula for Secondary Electron Yield of Metals at High Electron Energy and Incident Angle \theta

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