Simple Fabrication of Nickel Micropatterning under Ambient Condition: Use of Pen-Type Nanolithography and Electroless Plating
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概要
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Recently, the research and development of printed electronics has been expanded. Patterning of various materials is required to fabricate many electronic devices by the printing technique. Nickel patterning, for instance, is the subject matter of condensers. In this study, we demonstrated (1) catalytic Pd patterning by fountain-pen nanolithography (FPN) and (2) the preparation of Ni micropatterns by Ni electroless plating. The FPN is one of the pen-type nanolithography techniques and it can yield microsize patterns.
- 2012-06-25
著者
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Onoue Miki
Advanced Surface Processing Team, Flexible Electronics Research Center, National Institute of Advanced Industrial Science and Technology (AIST), Tsukuba, Ibaraki 305-8565, Japan
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Ushijima Hirobumi
Advanced Surface Processing Team, Flexible Electronics Research Center, National Institute of Advanced Industrial Science and Technology (AIST), Tsukuba, Ibaraki 305-8565, Japan