Phase Transition Mastering Technology for the Stamper of Blu-ray Recordable Disc

スポンサーリンク

概要

• 論文の詳細を見る

• This study presents a novel phase transition mastering (PTM) technology, having examined the feasibility to manufacture a stamper of Blu-ray recordable discs (BD-R). The presented PTM technology involves triple-layers coated on glass comprising a silicon layer, a inorganic photoresist layer, and a typical organic photoresist layer. The results reveal that the silicon layer is an integral part of light absorption in increasing the absorbed energy of the laser beam and an inorganic photoresist material, instead of traditional organic photoresist material used as the active layer for laser lithography. Moreover, an organic photoresist layer was formed on the top of the inorganic photoresist layer to prevent damage from the developing process, ensuring that the PTM stamper has a smooth surface. Detailed processes were revealed and the characteristics of BD-R $4\times$ disc using PTM stamper were demonstrated to confirm the feasibility of commercialization.

• 2011-09-25

著者

• Chiu Kuo-Chi

  Electronics and Optoelectronics Laboratories, Industrial Technology Research Institute, Hsinchu, Taiwan 300, R.O.C.

• Chen Jung-Po

  Electronics and Optoelectronics Laboratories, Industrial Technology Research Institute, Hsinchu, Taiwan 300, R.O.C.

• Chang Chun-Cheng

  Medium Research Division, Ritek Corporation, Hsinchu, Taiwan 300, R.O.C.

• Chen Chieh-Wen

  Medium Research Division, Ritek Corporation, Hsinchu, Taiwan 300, R.O.C.

• Wang Wei-Hsiang

  Medium Research Division, Ritek Corporation, Hsinchu, Taiwan 300, R.O.C.

関連論文

• Phase Transition Mastering Technology for the Stamper of Blu-ray Recordable Disc
• Optimization of Ge--Sb--Sn--O Films for Thermal Lithography of Submicron Structures

スポンサーリンク