Plasma Deposition of Diamond-Like Carbon

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概要

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• We describe some of the recent advances in the deposition and applications of amorphous diamond-like carbons, including an understanding of stress reduction by deposition. The subplantation model is described. Applications to hard, wear-resistant film are summarised.

• 2011-01-25

著者

• Robertson John

  Engineering Department, Cambridge University, Trumpington St, Cambridge CB2 1PZ, U.K.

関連論文

• Plasma Deposition of Diamond-Like Carbon
• Applications of Carbon Nanotubes Grown by Chemical Vapor Deposition (Special Issue : Advanced Plasma Science and Its Applications for Nitrides and Nanomaterials)

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