Structure of an Actuator and Reflective Coat for the Deformable Mirror

概要

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By using conventional micro-electro-mechanical system (MEMS) processes, we have successfully developed a highly accurate and easily controllable deformable mirror with a simple structure. Our deformable mirror is driven by a single actuator different from a conventional deformable mirror of multi-actuator type. The deformed shape is controlled by optimizing the strength distribution on the reverse side of the mirror. Furthermore, we have obtained a reflective film of low-stress which was previously a challenge. In addition, we will discuss the characteristics of the deformable mirror, particularly its internal structure and frequency response.
2010-08-25