Modeling Optical Lithography Physics
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概要
- 論文の詳細を見る
Key physical phenomena associated with resists, illumination, lenses and masks are used to show the progress in models and algorithms for modeling optical projection printing as well as current simulation challenges in managing process complexity for manufacturing. The amazing current capability and challenges for projection printing are discussed using the 22 nm device generation. A fundamental foundation for modeling resist exposure, partial coherent imaging and defect printability is given. The technology innovations of resolution enhancement and chemically amplified resist systems and their modeling challenges are overviewed. Automated chip-level applications in pattern pre-compensation and design-anticipation of residual process variations require new simulation approaches.
- 2010-06-25
著者
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Lynn Wang
231 Cory Hall, Department of Electrical Engineering and Computer Science, University of California, Berkeley, CA 94720-1770, U.S.A.
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Kenji Yamazoe
231 Cory Hall, Department of Electrical Engineering and Computer Science, University of California, Berkeley, CA 94720-1770, U.S.A.
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Neureuther Andrew
231 Cory Hall, Department of Electrical Engineering and Computer Science, University of California, Berkeley, CA 94720-1770, U.S.A.
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Rubinstein Juliet
231 Cory Hall, Department of Electrical Engineering and Computer Science, University of California, Berkeley, CA 94720-1770, U.S.A.
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Chin Eric
231 Cory Hall, Department of Electrical Engineering and Computer Science, University of California, Berkeley, CA 94720-1770, U.S.A.
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Marshal Miller
231 Cory Hall, Department of Electrical Engineering and Computer Science, University of California, Berkeley, CA 94720-1770, U.S.A.
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Chris Clifford
231 Cory Hall, Department of Electrical Engineering and Computer Science, University of California, Berkeley, CA 94720-1770, U.S.A.
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Eric Chin
231 Cory Hall, Department of Electrical Engineering and Computer Science, University of California, Berkeley, CA 94720-1770, U.S.A.
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Andrew R.
231 Cory Hall, Department of Electrical Engineering and Computer Science, University of California, Berkeley, CA 94720-1770, U.S.A.
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Juliet Rubinstein
231 Cory Hall, Department of Electrical Engineering and Computer Science, University of California, Berkeley, CA 94720-1770, U.S.A.