Nickel Line Patterning Using Silicon Supersonic Micronozzle Integrated with a Nanoparticle Deposition System

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概要

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• In this study, 3-μm- and 20-nm nickel powders were deposited on Si substrates to pattern a metal line using a nanoparticle deposition system (NPDS) at room temperature. The stand-off distance (SoD), the distance between the substrate and the end of nozzle, was varied from 300 to 1000 μm to determine its effect on deposition properties. A Ni line was successfully formed on the Si substrate. When 3-μm Ni powders were used, the thickness of the deposited layer on the Si substrate was measured to be 5.4 μm, and its width was 176.4 μm at a SoD of 300 μm. In contrast, the deposited average thickness at a SoD of 500 μm was 1.1 μm, with a width of 190.6 μm. Moreover, the deposited thickness was measured to be 6.4 μm using 20-nm Ni powders at a SoD of 300 μm. Thus, it was found that the deposited thickness decreased as SoD increased, indicating an inversely proportional relationship. For deposition behavior, depending on the size of powders, it was found that 20-nm Ni powders resulted in a thicker deposition than did 3-μm Ni powders, as momentum transfer between carrier gas and powders is inversely proportional to the powder size. Thus, as the powder size decreased, its spray velocity increased; hence, it is more effective to use nano powders for Ni line patterning. Surface resistivity of the deposited Ni line was $1.83 \times 10^{-7}$ $\Omega$$\cdot$m using 20-nm powders and $1.61 \times 10^{-7}$ $\Omega$$\cdot$m using 3-μm powders. These values are close to the standard resistivity value for bulk Ni, which is $6.9 \times 10^{-8}$ $\Omega$$\cdot$m, making NPDS a promising technique for metal line-fabrication equipment.

• 2010-05-25

著者

• Chun Doo-man

  School Of Mechanical And Aerospace Engineering And Institute Of Advanced Machinery And Design Seoul

• Doo-Man Chun

  School of Mechanical and Aerospace Engineering, Seoul National University, Seoul 151-742, Korea

• Yang-Hee Kim

  Department of Materials Engineering, Hanyang University, Ansan, Gyeonggi-do 426-791, Korea

• Jung Kyubong

  Department of Materials Engineering, Hanyang University, Ansan, Gyeonggi-do 426-791, Korea

• Song Woojin

  Department of Materials Engineering, Hanyang University, Ansan, Gyeonggi-do 426-791, Korea

• Jun-Cheol Yeo

  School of Mechanical and Aerospace Engineering, Seoul National University, Seoul 151-742, Korea

• Min-Saeng Kim

  School of Mechanical and Aerospace Engineering, Seoul National University, Seoul 151-742, Korea

• Sung-Hoon Ahn

  School of Mechanical and Aerospace Engineering, Seoul National University, Seoul 151-742, Korea

• Caroline Sunyong

  Department of Materials Engineering, Hanyang University, Ansan, Gyeonggi-do 426-791, Korea

• Kyubong Jung

  Department of Materials Engineering, Hanyang University, Ansan, Gyeonggi-do 426-791, Korea

関連論文

• Nanoparticle Deposition of Al_2O_3 Powders on Various Substrates
• Nickel Line Patterning Using Silicon Supersonic Micronozzle Integrated with a Nanoparticle Deposition System

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