Fabrication of Self-Assembled InGaAs Squarelike Nanoholes on GaAs(001) by Droplet Epitaxy
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概要
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The fabrication of self-assembled InGaAs squarelike nanoholes on GaAs(001) substrates grown by droplet epitaxy using molecular beam epitaxy was reported. The formation mechanism is explained by the As4 diffusion in droplets during the supply of As4 flux. The effects of substrate temperature (300–390 °C) during the InGa droplet deposition on their dimension and density were investigated. The surface morphology of InGaAs nanoholes as well as their depth profile was examined by atomic force microscopy (AFM). The square shape is oriented along [110] and [$1\bar{1}0$] crystallographic directions with slightly different profiles due to anisotropy behavior. The size uniformity of the squarelike nanoholes is well controlled with less deviation at higher substrate temperatures.
- 2010-04-25
著者
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PANYAKEOW Somsak
Semiconductor Device Research Laboratory, Department of Electrical Engineering, Faculty of Engineeri
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Somsak Panyakeow
Semiconductor Device Research Laboratory (Nanotec Center of Excellence), Department of Electrical Engineering, Faculty of Engineering, Chulalongkorn University, Bangkok 10330, Thailand
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Boonpeng Poonyasiri
Semiconductor Device Research Laboratory (Nanotec Center of Excellence), Department of Electrical Engineering, Faculty of Engineering, Chulalongkorn University, Bangkok 10330, Thailand
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Jevasuwan Wipakorn
Semiconductor Device Research Laboratory (Nanotec Center of Excellence), Department of Electrical Engineering, Faculty of Engineering, Chulalongkorn University, Bangkok 10330, Thailand
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Somchai Ratanathammaphan
Semiconductor Device Research Laboratory (Nanotec Center of Excellence), Department of Electrical Engineering, Faculty of Engineering, Chulalongkorn University, Bangkok 10330, Thailand
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Poonyasiri Boonpeng
Semiconductor Device Research Laboratory (Nanotec Center of Excellence), Department of Electrical Engineering, Faculty of Engineering, Chulalongkorn University, Bangkok 10330, Thailand
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Wipakorn Jevasuwan
Semiconductor Device Research Laboratory (Nanotec Center of Excellence), Department of Electrical Engineering, Faculty of Engineering, Chulalongkorn University, Bangkok 10330, Thailand
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- Fabrication of Self-Assembled InGaAs Squarelike Nanoholes on GaAs(001) by Droplet Epitaxy