Investigation of Bending Stability of Amorphous Zn–In–Sn-O Thin Films on Flexible Poly(ether sulfone) Substrates

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概要

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• Zn–In–Sn-O (ZITO) and ITO thin films were fabricated on flexible poly(ether sulfone) (PES) substrates by RF magnetron cosputtering. The bending stability of the films was investigated by employing a dynamic bending tester and monitoring the resistance change ($\Delta R$) of the films. The resistance of the polycrystalline ITO films increased more than eightfold after 600 cycles of dynamic bending, while the resistance of the amorphous ZITO thin films remained constant. Internal stress measurements and microscopic images revealed that the significant increase in the resistance of the polycrystalline ITO films was mainly attributed to the large compressive stress of the polycrystalline ITO films and the large quantity of cracks or delaminations generated as the films were bent, while the amorphous ZITO films remained substantially intact. These results showed that the amorphous ZITO thin films had high mechanical durability against external dynamic stress and the possible application of flexible optoelectronic devices.

• 2010-03-25

著者

• Tae-Won Kim

  National Center for Nanoprocess and Equipments, Honam Technology Service Division, Korea Institute of Industrial Technology, Gwangju 500-480, Korea

• Heo Gi-Seok

  National Center for Nanoprocess and Equipments, Honam Technology Service Division, Korea Institute of Industrial Technology, Gwangju 500-480, Korea

• Gim In-Gi

  National Center for Nanoprocess and Equipments, Honam Technology Service Division, Korea Institute of Industrial Technology, Gwangju 500-480, Korea

• Hyun-Kee Lee

  Department of Materials Science and Engineering, Chonnam National University, Gwangju 500-757, Korea

• Jeong-Hwan Song

  Department of Information and Electronic Materials Engineering, PaiChai University, Daejeon 302-735, Korea

• Gi-Seok Heo

  National Center for Nanoprocess and Equipments, Honam Technology Service Division, Korea Institute of Industrial Technology, Gwangju 500-480, Korea

• Lee Hyun-Kee

  Department of Materials Science and Engineering, Chonnam National University, Gwangju 500-757, Korea

関連論文

• Deposition of Amorphous Zinc Indium Tin Oxide and Indium Tin Oxide Films on Flexible Poly(ether sulfone) Substrate Using RF Magnetron Co-sputtering System
• Investigation of Bending Stability of Amorphous Zn–In–Sn-O Thin Films on Flexible Poly(ether sulfone) Substrates

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