Epitaxial Growth and Electrical Properties of Thick SmSi2 Layers on (001) Silicon
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概要
- 論文の詳細を見る
We report on the growth of thick (up to 1.2 μm) epitaxial samarium disilicide layers on (001) oriented silicon substrates. The films have the bulk tetragonal SmSi2 structure and composition, and grow with a preferential orientation SmSi2[100] $\parallel$ Si[110]. A surface reconstruction transition from ($1{\times}1$) to ($2{\times}2$) appears below ${\sim}525$ °C. Transport measurements show an n-type metallic conduction with a room temperature resistivity of 175 μ$\Omega$ cm decreasing to 85 μ$\Omega$ cm at 4 K, and a carrier concentration of $1.3 \times 10^{22}$ cm-3.
- 2010-02-25
著者
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Jan Richter
The MacDiarmid Institute for Advanced Materials and Nanotechnology, School of Chemical and Physical Sciences, Victoria University, P.O. Box 600, Wellington 6140, New Zealand
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Natalie O.
The MacDiarmid Institute for Advanced Materials and Nanotechnology, School of Chemical and Physical Sciences, Victoria University, P.O. Box 600, Wellington 6140, New Zealand
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Lionel Hirsch
Laboratory of Integration from Materials to Systems (IMS), UMR CNRS 5218, Site ENSCPB, 16 Av Pey Berland, 33607 Pessac, France
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John V.
National Isotope Centre, GNS Science, 30 Gracefield Road, P.O. Box 31312, Lower Hutt, New Zealand
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Natali Franck
The MacDiarmid Institute for Advanced Materials and Nanotechnology, School of Chemical and Physical Sciences, Victoria University, P.O. Box 600, Wellington 6140, New Zealand
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Plank Natalie
The MacDiarmid Institute for Advanced Materials and Nanotechnology, School of Chemical and Physical Sciences, Victoria University, P.O. Box 600, Wellington 6140, New Zealand
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Ludbrook Bart
The MacDiarmid Institute for Advanced Materials and Nanotechnology, School of Chemical and Physical Sciences, Victoria University, P.O. Box 600, Wellington 6140, New Zealand
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Thom Minnee
The MacDiarmid Institute for Advanced Materials and Nanotechnology, School of Chemical and Physical Sciences, Victoria University, P.O. Box 600, Wellington 6140, New Zealand
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Ben J.
The MacDiarmid Institute for Advanced Materials and Nanotechnology, School of Chemical and Physical Sciences, Victoria University, P.O. Box 600, Wellington 6140, New Zealand
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H. Joe
The MacDiarmid Institute for Advanced Materials and Nanotechnology, School of Chemical and Physical Sciences, Victoria University, P.O. Box 600, Wellington 6140, New Zealand
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Bart M.
The MacDiarmid Institute for Advanced Materials and Nanotechnology, School of Chemical and Physical Sciences, Victoria University, P.O. Box 600, Wellington 6140, New Zealand
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Franck Natali
The MacDiarmid Institute for Advanced Materials and Nanotechnology, School of Chemical and Physical Sciences, Victoria University, P.O. Box 600, Wellington 6140, New Zealand