Micro Pattern Roll Mold for Large Area Display by Electroforming and Wrapping Method

概要

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A pattern roll mold for imprinting 15-in. liquid crystal display black matrix was fabricated. A Ni sheet mold was replicated by electroforming process. For high accurate sheet mold wrapping process, a sheet mold wrapping machine was developed. Using the roll mold, black matrix patterns were manufactured by a roll-to-roll nanoimprint lithography system with high pattern uniformity. The electroformed Ni sheet mold has 0.01% dimensional error rate due to the thermal and internal stress. The radius variation of the roll increases by 2 μm after wrapping the sheet mold. And alignment error in wrapping was $8.2\times 10^{-5}$ radian out of vertical line.
2009-05-25