Hydrogen and Stress-Induced De-lamination in an IrO2 Layer of Ferroelectric Random Access Memories

概要

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During the device lifetime tests such as high temperature operational life (HTOL) and high temperature storage (HTS) tests, a physical de-lamination of the IrO2 layer in vertical conjunction to pulsed plate-line, so-called here additional top electrode (ATE), ATE has appeared and localized in specific cell arrays. This failure stems either from the reduction of IrO2 by the penetrated hydrogen at the interface between ATE Ir to top electrode (TE) Ir or from lack of dummy cells applied, or both. In the back end of line (BEOL), several heat treatments were introduced and then the reduction was reduced. It is essential to consider a deliberated anneal procedure in the BEOL integration. This is because otherwise case may provoke a contact failure in pulsed plate-line node of cell arrays. Also, we simulate stress distribution in cell arrays depending on how many dummy cells have been taken into account. The fluctuation of the stress projected on the IrO2 layer should be controlled uniformly by adding a certain number dummy cells.
2009-04-25