Fabrication of Single Crystalline (La,Ba)MnO3 Nanodot Array by Mo/SiOx Lift-Off Technique

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概要

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• Nanoimprint-lithography-based molybdenum lift-off was applied to fabricate a perovskite-type La0.8Ba0.2MnO3(LBMO) nanodot array on a SrTiO3(100) substrate in combination with an in situ pulsed laser deposition (PLD) technique. We fabricated a Mo/SiOx bilayer mask pattern to prevent the crystallization of the Mo layer even at 700 °C and successfully obtained a LBMO nanodot array with a dot size as small as 200 nm by removing the Mo layer using 0.1 N NaOH aqueous solution.

• 2009-11-25

著者

• Kawai Tomoji

  JST-CREST, 4-1-8 Honcho, Kawaguchi, Saitama 332-0012, Japan

• Suzuki Naoki

  JST-CREST, 4-1-8 Honcho, Kawaguchi, Saitama 332-0012, Japan

• Tanaka Hidekazu

  JST-CREST, 4-1-8 Honcho, Kawaguchi, Saitama 332-0012, Japan

関連論文

• Fabrication of Single Crystalline (La,Ba)MnO3 Nanodot Array by Mo/SiOx Lift-Off Technique

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