Optical Detection System of Defects in Multi Layered Optical Device

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概要

• 論文の詳細を見る

• We developed a new optical detection method for defects in multilayered optical devices. An optical detection is achieved by sensing the scattering twinkle points of guided light in a multilayered optical device and by analyzing the scattering properties of the twinkle points. We found a difference in scattering property between defective points and nondefective points, and developed a check system for the scattering direction from a scattering twinkle point. By this optical defect detection method, we realize a decrease in defect detection error.

• 2008-08-25

著者

• Kurata Yukio

  Optical Disk Systems Development Center Sharp Corporation

• Kurimoto Eiji

  Optical Module Technology Research Laboratories, Sharp Corporation, 2613-1 Ichinomoto, Tenri, Nara 632-8567, Japan

• Nakata Yasuo

  BD Business Development & Promotion Center, Sharp Corporation, 247 Sojo, Numatanishi, Mihara, Hiroshima 729-0474, Japan

• Minami Kohji

  Optical Module Technology Research Laboratories, Sharp Corporation, 2613-1 Ichinomoto, Tenri, Nara 632-8567, Japan

• Miyake Tomoyuki

  Corporate R&D Alliance Center, Sharp Corporation, 2613-1 Ichinomoto, Tenri, Nara 632-8567, Japan

• Hirano Kenji

  Imaging & Sensing LSI Division, Sharp Corporation, 2613-1 Ichinomoto, Tenri, Nara 632-8567, Japan

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