Selective Growth of Vertically Aligned Single-, Double-, and Triple-Walled Carbon Nanotubes by Radiation-Heated Chemical Vapor Deposition

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概要

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• The synthesis of vertically aligned single-walled carbon nanotube (SWCNT), double-walled carbon nanotube (DWCNT), and triple-walled carbon nanotube (TWCNT) films has been achieved by a combination of radiation-heated chemical vapor deposition (RHCVD) and long-throw sputtering. The proportions of specific walled CNTs/as-grown CNTs are as follows: SWCNT/CNT ratio of 87%, DWCNT/CNT ratio of 83%, and TWCNT/CNT ratio of 62%. When the population density of vertically aligned CNTs on a substrate ranges from $1.1 \times 10^{9}$ to $7.1 \times 10^{10}$ bundles/cm2, the selective growth of graphene walls of CNTs is achieved. As outer diameters and the number of graphene walls of CNTs increase, CNTs grow longer. It is considered that the larger the metallic catalyst diameter, the longer the catalyst lifetime.

• 2008-01-25

著者

• Taki Yusuke

  Smart Materials Research Section, Materials and Advanced Research Laboratory, Nikon Corp., 10-1 Asamizodai 1-chome, Sagamihara, Kanagawa 228-0828, Japan

• Shinohara Kiyoaki

  Smart Materials Research Section, Materials and Advanced Research Laboratory, Nikon Corp., 10-1 Asamizodai 1-chome, Sagamihara, Kanagawa 228-0828, Japan

• Kikuchi Makiko

  Smart Materials Research Section, Materials and Advanced Research Laboratory, Nikon Corp., 10-1 Asamizodai 1-chome, Sagamihara, Kanagawa 228-0828, Japan

• Tanaka Akira

  Smart Materials Research Section, Materials and Advanced Research Laboratory, Nikon Corp., 10-1 Asamizodai 1-chome, Sagamihara, Kanagawa 228-0828, Japan

関連論文

• Selective Growth of Single-, Double-, and Triple-Walled Carbon Nanotubes through Precise Control of Catalyst Diameter by Radiation-Heated Chemical Vapor Deposition
• Selective Growth of Vertically Aligned Single-, Double-, and Triple-Walled Carbon Nanotubes by Radiation-Heated Chemical Vapor Deposition

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